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EQUIPMENT NAME
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STATUS
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COMMENTS
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49ER Calendar
Link
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TOOL GURU &
Phone Number (704) 687-
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Routine Maintenance
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Recharge
UNIT
Yes/No
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Clean Room Basic Operations
Service Line
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Lithography
Service Line
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Quintel Q 4000-6 NUV Mask Aligner
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Alec Martin 8142
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Raith 150 E-Beam Lithography System
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Imprio 100 Molecular Imprint Nanoimprint Lithography System
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Operational; undergoing evaluation & process development
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Lou Deguzman
7-8111
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Laurell Spin Processor
WS-400B-6NPP-LITE
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Lou
Deguzman
7-8111
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Brewer Science
Spin Processor Cee 200
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Lou
Deguzman
7-8111
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Brewer Science Hotplate Cee 1100FX
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Lou
Deguzman
7-8111
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GCA DSW
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VWR Vacuum Oven
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Lou
Deguzman
7-8111
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Material Growth & Etching
Service Line
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AJA International ATC 1500-F Ion Mill System
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Alec
Martin
7-8142
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AJA International ATC 1800-F Sputter Deposition Tool
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Fully Operational
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Alec Martin
7-8142
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Routine Maintenance Link
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IEI ICP Compound Semiconductor Etch System
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Fully Operational
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STS ICP Deep Silicon Etch System
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Fully Operational.
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Alec Martin 7-8142
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Routine Maintenance Link
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STS ICP Dielectric Etch System
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Carousel giving intermittent "Table Index" Fault. A Workaround is Available. STS Has Been Notified.
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Alec Martin 7-8142
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Routine Maintenance Link
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STS ICP III-V Etch System
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Fully Operational |
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Alec Martin 7-8142
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Routine Maintenance Link
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STS PECVD System
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Fullly
Operational
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Alec Martin 7-8142
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Routine Maintenance Link
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Kurt Lesker PVD75 Evaporator
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View Schedule
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MOCVD
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Microautomation Wafer Saw
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Bruce
7-8180
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Supercritical Drying Station
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Omicron STM/AFM System
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SSI Solaris 150 Rapid Thermal Process System
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Fully Operational
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Trion RIE System
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Unaxis ICP III-V
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Optoelectronic Fabrication and Packaging
Service Line
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LCD-100 Scriber&Breaker
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Finetech Lambda
Flip-Chip Die Bonder
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K&S 4524AD
Wire Bonder
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Metrology
Service Line
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Tencor Instruments Alpha-step 200 Surface Profi
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X-Ray Interferometer
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Zygo 4” Interferometer
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Veeco General Purpose Phoase Shifting Interferometer
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Fisba-Optik Micro Interferometer
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Canon Microscope 1
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Bruce
7-8180
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Canon Microscope 2
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Bruce
7-8180
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Nanospec AFT
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Alec
Martin
7-8142
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Imaging & Characterization
Service Line
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JEOL JSM-646LV Scanning Electron Microscope
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Water chiller is fixed. SEM is up and running now!
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Alec
Martin
7-8142
Haitao Zhang 7-8128
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Veeco Nanoscope IV AFM
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View
Schedule
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Woolam WVASE32 Spectrascopic Ellipsometer
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View Schedule
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Z-scan Apparatus
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Nano Alignment Systems
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Veeco Nanoscope IV SPM Control Station
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Tektronix Semiconductor Parameter Tester
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STN Probe Station
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Cathodoluminesence
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EDAX
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Alec
Martin
7-8142
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Deep Level Transient Spectroscopy
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Spectrometers & Microscopes
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Cambridge SEM
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Panalytical Xray Diffractometer (XRD)
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Fully Operational. |
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Alec Martin
7-8142
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Networking & Fiber Optics
Service Line
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Fujikura Fusion Splicer
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Movaz DWDM
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Optellios Fusion Splicer
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Agilent Optical Spectrum Analyzer
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Luna Optical Backscatter Reflectometer
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Optotek Tunable Laser System Telecom Camera
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Melles Griot Bookends with Internal Piezos
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End & Edge Polishing System
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Optellios Motion Controller Plus
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Fiber Lensing Polishing System
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Burleigh Photonics Alignment System
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Luna Benchtop Optical Vector Analyzer
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Agilent All Parameter Test Station 81910A
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Newport Ultra Short Laser Pulse Measurement S
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Tektronix Oscilloscopes
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EXFO Optical Time Domain Reflectometer
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Exera Fiber Splicing Kit Heat Oven
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Laser Facility
Service Line
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Femtosecond Laser System – 250 KHz Amplifier
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Femtosecond Laser System – 1KHz Amplifier Sy
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Fiber Laser Modules
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Continuum Pulsed Q-Switched Nd Yag Laser
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Research Grade Optical Tables
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Excel Yag Laser Opotic System
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Simulation & Modeling
Service Line
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EM Premier Workstation
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Rsoft
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FemLabs
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Full Wave
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FDTD
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